Publication:
Carrier illumination for characterization of ultrashallow doping profiles
Date
| dc.contributor.author | Clarysse, Trudo | |
| dc.contributor.author | Lindsay, Richard | |
| dc.contributor.author | Vandervorst, Wilfried | |
| dc.contributor.author | Budiarto, E. | |
| dc.contributor.author | Borden, P. | |
| dc.contributor.imecauthor | Vandervorst, Wilfried | |
| dc.date.accessioned | 2021-10-15T12:53:57Z | |
| dc.date.available | 2021-10-15T12:53:57Z | |
| dc.date.issued | 2004-02 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/8698 | |
| dc.source.beginpage | 439 | |
| dc.source.endpage | 443 | |
| dc.source.issue | 1 | |
| dc.source.journal | Journal of Vacuum Science and Technology B | |
| dc.source.volume | 22 | |
| dc.title | Carrier illumination for characterization of ultrashallow doping profiles | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
| Publication available in collections: |