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Damage free cryogenic etch of ultra low-k materials: recent experimental results and theoretical analysis
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2073 since deposited on 2021-10-21
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Acq. date: 2025-10-25
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Views
2073 since deposited on 2021-10-21
439item.page.metrics.field.last-week
Acq. date: 2025-10-25
Citations