Publication:
HfONx high-k layers deposited by MOCVD in mixed gas flows of N2O and O2
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1936 since deposited on 2021-10-15
1last month
Acq. date: 2025-12-08
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Metrics
Views
1936 since deposited on 2021-10-15
1last month
Acq. date: 2025-12-08
Citations