Publication:

HfONx high-k layers deposited by MOCVD in mixed gas flows of N2O and O2

Date

2003
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Author(s)

Zhao, Chao
;
Van Elshocht, Sven  
;
Conard, Thierry  
;
Xu, Zhen
;
Caymax, Matty  
;
De Gendt, Stefan  
;
Heyns, Marc  

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