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Chemical vapour deposition of Si:C and Si:C:P films – evaluation of material quality as a function of C content, carrier gas and doping
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1833 since deposited on 2021-10-22
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Acq. date: 2025-10-25
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Metrics
Views
1833 since deposited on 2021-10-22
403item.page.metrics.field.last-week
Acq. date: 2025-10-25
Citations