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Gate voltage and geometry dependence of the series resistance and of the carrier mobility in FinFET devices

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dc.contributor.authorMagnone, Paolo
dc.contributor.authorSubramanian, Vaidy
dc.contributor.authorParvais, Bertrand
dc.contributor.authorMercha, Abdelkarim
dc.contributor.authorPace, Calogero
dc.contributor.authorDehan, Morin
dc.contributor.authorDecoutere, Stefaan
dc.contributor.authorGroeseneken, Guido
dc.contributor.authorCrupi, Felice
dc.contributor.authorPierro, Silvio
dc.contributor.imecauthorParvais, Bertrand
dc.contributor.imecauthorMercha, Abdelkarim
dc.contributor.imecauthorDecoutere, Stefaan
dc.contributor.imecauthorGroeseneken, Guido
dc.contributor.orcidimecParvais, Bertrand::0000-0003-0769-7069
dc.contributor.orcidimecMercha, Abdelkarim::0000-0002-2174-6958
dc.contributor.orcidimecDecoutere, Stefaan::0000-0001-6632-6239
dc.date.accessioned2021-10-17T08:41:55Z
dc.date.available2021-10-17T08:41:55Z
dc.date.embargo9999-12-31
dc.date.issued2008
dc.identifier.issn0167-9317
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/14099
dc.source.beginpage1728
dc.source.endpage1731
dc.source.issue3
dc.source.journalMicroelectronic Engineering
dc.source.volume85
dc.title

Gate voltage and geometry dependence of the series resistance and of the carrier mobility in FinFET devices

dc.typeJournal article
dspace.entity.typePublication
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