Skip to content
Institutional repository
Communities & Collections
Browse
Site
Log In
imec Publications
Conference contributions
A silicon-controlled rectifier-based ESD protection for MEMS – Merits and challenges
Publication:
A silicon-controlled rectifier-based ESD protection for MEMS – Merits and challenges
Date
2011
Proceedings Paper
Simple item page
Full metadata
Statistics
Loading...
Loading...
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Sangameswaran, Sandeep
;
Thijs, Steven
;
Scholz, Mirko
;
De Coster, Jeroen
;
Linten, Dimitri
;
Groeseneken, Guido
;
De Wolf, Ingrid
Journal
Abstract
Description
Metrics
Views
1932
since deposited on 2021-10-19
424
item.page.metrics.field.last-week
Acq. date: 2025-10-25
Citations
Metrics
Views
1932
since deposited on 2021-10-19
424
item.page.metrics.field.last-week
Acq. date: 2025-10-25
Citations