Publication:
A silicon-controlled rectifier-based ESD protection for MEMS – Merits and challenges
Date
| dc.contributor.author | Sangameswaran, Sandeep | |
| dc.contributor.author | Thijs, Steven | |
| dc.contributor.author | Scholz, Mirko | |
| dc.contributor.author | De Coster, Jeroen | |
| dc.contributor.author | Linten, Dimitri | |
| dc.contributor.author | Groeseneken, Guido | |
| dc.contributor.author | De Wolf, Ingrid | |
| dc.contributor.imecauthor | Thijs, Steven | |
| dc.contributor.imecauthor | De Coster, Jeroen | |
| dc.contributor.imecauthor | Linten, Dimitri | |
| dc.contributor.imecauthor | Groeseneken, Guido | |
| dc.contributor.imecauthor | De Wolf, Ingrid | |
| dc.contributor.orcidimec | Thijs, Steven::0000-0003-2889-8345 | |
| dc.contributor.orcidimec | Linten, Dimitri::0000-0001-8434-1838 | |
| dc.contributor.orcidimec | De Wolf, Ingrid::0000-0003-3822-5953 | |
| dc.contributor.orcidimec | De Coster, Jeroen::0000-0002-4893-0691 | |
| dc.contributor.orcidimec | Groeseneken, Guido::0000-0003-3763-2098 | |
| dc.date.accessioned | 2021-10-19T18:24:29Z | |
| dc.date.available | 2021-10-19T18:24:29Z | |
| dc.date.issued | 2011 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/19725 | |
| dc.source.conference | 33rd Annual EOS/ESD Symposium | |
| dc.source.conferencedate | 11/09/2011 | |
| dc.source.conferencelocation | Anaheim, CA USA | |
| dc.title | A silicon-controlled rectifier-based ESD protection for MEMS – Merits and challenges | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
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