Publication:
Integrating MEMS with standard CMOS using low temperature poly-SiGe technology
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1801 since deposited on 2021-10-15
1last month
Acq. date: 2025-12-15
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Metrics
Views
1801 since deposited on 2021-10-15
1last month
Acq. date: 2025-12-15
Citations