Publication:
Integrating MEMS with standard CMOS using low temperature poly-SiGe technology
Date
| dc.contributor.author | Pieters, Philip | |
| dc.contributor.imecauthor | Pieters, Philip | |
| dc.date.accessioned | 2021-10-15T15:26:53Z | |
| dc.date.available | 2021-10-15T15:26:53Z | |
| dc.date.issued | 2004 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/9426 | |
| dc.source.beginpage | 43 | |
| dc.source.conference | Proceedings of the 11th International KGD Packaging and Test Workshop | |
| dc.source.conferencedate | 12/09/2004 | |
| dc.source.conferencelocation | Napa, CA USA | |
| dc.title | Integrating MEMS with standard CMOS using low temperature poly-SiGe technology | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
| Files | ||
| Publication available in collections: |