Publication:
Material studies on Si:C and Si:CP epitaxial films grown using disilane, monomethylsilane and phosphine
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1854 since deposited on 2021-10-22
2last month
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Acq. date: 2026-09-19
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Statistics
Views
1854 since deposited on 2021-10-22
2last month
1last week
Acq. date: 2026-09-19
Citations