Publication:
Material studies on Si:C and Si:CP epitaxial films grown using disilane, monomethylsilane and phosphine
Date
| dc.contributor.author | Dhayalan, Sathish Kumar | |
| dc.contributor.author | Loo, Roger | |
| dc.contributor.author | Rosseel, Erik | |
| dc.contributor.author | Hikavyy, Andriy | |
| dc.contributor.author | Shimura, Yosuke | |
| dc.contributor.author | Nuytten, Thomas | |
| dc.contributor.author | Richard, Olivier | |
| dc.contributor.author | Bender, Hugo | |
| dc.contributor.author | Douhard, Bastien | |
| dc.contributor.author | Vandervorst, Wilfried | |
| dc.contributor.imecauthor | Loo, Roger | |
| dc.contributor.imecauthor | Rosseel, Erik | |
| dc.contributor.imecauthor | Hikavyy, Andriy | |
| dc.contributor.imecauthor | Nuytten, Thomas | |
| dc.contributor.imecauthor | Richard, Olivier | |
| dc.contributor.imecauthor | Bender, Hugo | |
| dc.contributor.imecauthor | Douhard, Bastien | |
| dc.contributor.imecauthor | Vandervorst, Wilfried | |
| dc.contributor.orcidimec | Loo, Roger::0000-0003-3513-6058 | |
| dc.contributor.orcidimec | Hikavyy, Andriy::0000-0002-8201-075X | |
| dc.contributor.orcidimec | Nuytten, Thomas::0000-0002-5921-6928 | |
| dc.contributor.orcidimec | Richard, Olivier::0000-0002-3994-8021 | |
| dc.date.accessioned | 2021-10-22T01:17:16Z | |
| dc.date.available | 2021-10-22T01:17:16Z | |
| dc.date.issued | 2014 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/23765 | |
| dc.identifier.url | https://ecs.confex.com/ecs/226/webprogram/Paper40652.html | |
| dc.source.beginpage | 1858 | |
| dc.source.conference | 226th Fall Meeting of the Electrochemical Society | |
| dc.source.conferencedate | 5/10/2014 | |
| dc.source.conferencelocation | Cancun Mexico | |
| dc.title | Material studies on Si:C and Si:CP epitaxial films grown using disilane, monomethylsilane and phosphine | |
| dc.type | Meeting abstract | |
| dspace.entity.type | Publication | |
| Files | ||
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