Determination of optical constants of thin films in the EUV

Ciesielski, Richard; Saadeh, Qais; Philipsen, Vicky; Opsomer, Karl; Soulie, Jean-Philippe; Wu, Meiyi; Naujok, Philipp; van de Kruijs, Robbert W. E.; Detavernier, Christophe; Kolbe, Michael; Scholze, Frank; Soltwisch, Victor

doi:10.1364/AO.447152

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Determination of optical constants of thin films in the EUV

Date

2022

Journal article

https://doi.org/10.1364/AO.447152

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Author(s)

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Soulie, Jean-Philippe

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Wu, Meiyi

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Naujok, Philipp

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van de Kruijs, Robbert W. E.

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Detavernier, Christophe

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Kolbe, Michael

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Scholze, Frank

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Soltwisch, Victor

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APPLIED OPTICS

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343 since deposited on 2022-03-26

Acq. date: 2026-06-22

1824 since deposited on 2022-03-26

Acq. date: 2026-06-22

Determination of optical constants of thin films in the EUV

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