Publication:

Determination of optical constants of thin films in the EUV

Date

2022
Journal article
https://doi.org/10.1364/AO.447152
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Published version 5.93 MB

Author(s)

Ciesielski, Richard
;
Saadeh, Qais
;
Philipsen, Vicky  
;
Opsomer, Karl  
;
Soulie, Jean-Philippe
;
Wu, Meiyi  
;
Naujok, Philipp
;
van de Kruijs, Robbert W. E.
;
Detavernier, Christophe
;
Kolbe, Michael
;
Scholze, Frank
;
Soltwisch, Victor

Journal

APPLIED OPTICS

Abstract

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93 since deposited on 2022-03-26
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1816 since deposited on 2022-03-26
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