Publication:

Determination of optical constants of thin films in the EUV

Date

2022
Journal article
https://doi.org/10.1364/AO.447152
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dc.contributor.authorCiesielski, Richard
dc.contributor.authorSaadeh, Qais
dc.contributor.authorPhilipsen, Vicky
dc.contributor.authorOpsomer, Karl
dc.contributor.authorSoulie, Jean-Philippe
dc.contributor.authorWu, Meiyi
dc.contributor.authorNaujok, Philipp
dc.contributor.authorvan de Kruijs, Robbert W. E.
dc.contributor.authorDetavernier, Christophe
dc.contributor.authorKolbe, Michael
dc.contributor.authorScholze, Frank
dc.contributor.authorSoltwisch, Victor
dc.contributor.imecauthorPhilipsen, Vicky
dc.contributor.imecauthorOpsomer, Karl
dc.contributor.imecauthorSoulie, Jean-Philippe
dc.contributor.imecauthorWu, Meiyi
dc.contributor.orcidimecPhilipsen, Vicky::0000-0002-2959-432X
dc.contributor.orcidimecSoulie, Jean-Philippe::0000-0002-5956-6485
dc.date.accessioned2022-04-05T09:35:25Z
dc.date.available2022-03-26T02:08:25Z
dc.date.available2022-03-28T11:54:16Z
dc.date.available2022-04-05T09:35:25Z
dc.date.embargo2022-03-31
dc.date.issued2022
dc.description.wosFundingTextHorizon 2020 Framework Programme (20IND04, 662338, 783247).
dc.identifier.doi10.1364/AO.447152
dc.identifier.issn1559-128X
dc.identifier.pmidMEDLINE:35297898
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/39535
dc.publisherOPTICAL SOC AMER
dc.source.beginpage2060
dc.source.endpage2078
dc.source.issue8
dc.source.journalAPPLIED OPTICS
dc.source.numberofpages19
dc.source.volume61
dc.subject.keywordsSOFT-X-RAY
dc.subject.keywordsEXTREME-ULTRAVIOLET
dc.subject.keywordsMULTILAYER MIRRORS
dc.subject.keywordsTOTAL-REFLECTION
dc.subject.keywordsSCATTERING
dc.subject.keywordsSURFACE
dc.subject.keywordsATTENUATION
dc.subject.keywordsMOLYBDENUM
dc.subject.keywordsABSORPTION
dc.subject.keywordsTABULATION
dc.title

Determination of optical constants of thin films in the EUV

dc.typeJournal article
dspace.entity.typePublication
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