Publication:
A versatile LPCVD silicon nitride platform for heterogenous photonic circuits: Ultra tight thickness control and low propagation loss
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Acq. date: 2026-08-11
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Acq. date: 2026-08-11
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4 since deposited on 2021-10-27
Acq. date: 2026-08-11
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1956 since deposited on 2021-10-27
7last month
2last week
Acq. date: 2026-08-11
Citations