Publication:
A versatile LPCVD silicon nitride platform for heterogenous photonic circuits: Ultra tight thickness control and low propagation loss
Date
Loading...
Files
Journal
Abstract
Description
Metrics
Downloads
4 since deposited on 2021-10-27
Acq. date: 2026-01-09
Views
1945 since deposited on 2021-10-27
Acq. date: 2026-01-09
Citations
Metrics
Downloads
4 since deposited on 2021-10-27
Acq. date: 2026-01-09
Views
1945 since deposited on 2021-10-27
Acq. date: 2026-01-09
Citations