Publication:

Zeolite-like films for low-k applications

Date

2008

Meeting abstract

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Author(s)

Eslava Fernandez, Salvador

;

Baklanov, Mikhaïl

;

Iacopi, Francesca

;

;

Busawon, Abheesh N.

;

Kirschhock, Christine E. A.

;

;

Martens, Johan A.

Statistics

2112 since deposited on 2021-10-17

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Acq. date: 2026-04-06