Publication:
Zeolite-like films for low-k applications
Date
| dc.contributor.author | Eslava Fernandez, Salvador | |
| dc.contributor.author | Baklanov, Mikhaïl | |
| dc.contributor.author | Iacopi, Francesca | |
| dc.contributor.author | Urrutia, Jone | |
| dc.contributor.author | Busawon, Abheesh N. | |
| dc.contributor.author | Kirschhock, Christine E. A. | |
| dc.contributor.author | Maex, Karen | |
| dc.contributor.author | Martens, Johan A. | |
| dc.contributor.imecauthor | Maex, Karen | |
| dc.date.accessioned | 2021-10-17T07:01:23Z | |
| dc.date.available | 2021-10-17T07:01:23Z | |
| dc.date.issued | 2008 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/13699 | |
| dc.source.conference | MRS Spring Meeting Symposium N: Materials and Processes for Advanced Interconnects for Microelectronics | |
| dc.source.conferencedate | 24/03/2008 | |
| dc.source.conferencelocation | San Francisco, CA USA | |
| dc.title | Zeolite-like films for low-k applications | |
| dc.type | Meeting abstract | |
| dspace.entity.type | Publication | |
| Files | ||
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