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  4. CMOS integration of dual work function phase controlled Ni FUSI with simultaneous integration of nMOS (NiSi) and pMOS (Ni-rich silicide) gates on HfSiON
 
Publication:

CMOS integration of dual work function phase controlled Ni FUSI with simultaneous integration of nMOS (NiSi) and pMOS (Ni-rich silicide) gates on HfSiON

Date

2005-12
Proceedings Paper
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Author(s)

Lauwers, Anne  
;
Veloso, Anabela  
;
Hoffmann, Thomas Y.
;
Van Dal, Mark  
;
Vrancken, Christa  
;
Brus, Stephan  
;
Locorotondo, Sabrina  
;
de Marneffe, Jean-Francois  
;
Sijmus, Bram
;
Kubicek, Stefan  
;
Chiarella, Thomas  
;
Kmieciak, Malgorzata
;
Opsomer, Karl  
;
Niwa, Masaaki
;
Mitsuhashi, Riichirou
;
Kottantharayil, Anil
;
Yu, HongYu
;
Demeurisse, Caroline  
;
Verbeeck, Rita  
;
de Potter de ten Broeck, Muriel  
;
Absil, Philippe  
;
Maex, Karen  
;
Jurczak, Gosia  
;
Biesemans, Serge  
;
Kittl, Jorge

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1953 since deposited on 2021-10-16
Acq. date: 2025-10-23

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1953 since deposited on 2021-10-16
Acq. date: 2025-10-23

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