Matching performance of FinFET devices with fin widths down to 10nm

Magnone, Paolo; Mercha, Abdelkarim; Subramanian, Vaidy; Parvais, Bertrand; Collaert, Nadine; Dehan, Morin; Decoutere, Stefaan; Groeseneken, Guido; Benson, Jim; Merelle, Thomas; Lander, Rob; Crupi, Felice; Pace, C.

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Matching performance of FinFET devices with fin widths down to 10nm

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2009

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IEEE Electron Device Letters

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Acq. date: 2026-01-07

Matching performance of FinFET devices with fin widths down to 10nm

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