Publication:

Matching performance of FinFET devices with fin widths down to 10nm

Date

2009
Journal article
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dc.contributor.authorMagnone, Paolo
dc.contributor.authorMercha, Abdelkarim
dc.contributor.authorSubramanian, Vaidy
dc.contributor.authorParvais, Bertrand
dc.contributor.authorCollaert, Nadine
dc.contributor.authorDehan, Morin
dc.contributor.authorDecoutere, Stefaan
dc.contributor.authorGroeseneken, Guido
dc.contributor.authorBenson, Jim
dc.contributor.authorMerelle, Thomas
dc.contributor.authorLander, Rob
dc.contributor.authorCrupi, Felice
dc.contributor.authorPace, C.
dc.contributor.imecauthorMercha, Abdelkarim
dc.contributor.imecauthorParvais, Bertrand
dc.contributor.imecauthorCollaert, Nadine
dc.contributor.imecauthorDecoutere, Stefaan
dc.contributor.imecauthorGroeseneken, Guido
dc.contributor.orcidimecMercha, Abdelkarim::0000-0002-2174-6958
dc.contributor.orcidimecParvais, Bertrand::0000-0003-0769-7069
dc.contributor.orcidimecCollaert, Nadine::0000-0002-8062-3165
dc.contributor.orcidimecDecoutere, Stefaan::0000-0001-6632-6239
dc.date.accessioned2021-10-18T00:24:02Z
dc.date.available2021-10-18T00:24:02Z
dc.date.embargo9999-12-31
dc.date.issued2009
dc.identifier.issn0741-3106
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/15786
dc.source.beginpage1374
dc.source.endpage1376
dc.source.issue12
dc.source.journalIEEE Electron Device Letters
dc.source.volume30
dc.title

Matching performance of FinFET devices with fin widths down to 10nm

dc.typeJournal article
dspace.entity.typePublication
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