Publication:

A novel PEALD tunnel dielectric for three-dimensional non-volatile charge-trapping technology

Date

2011

Journal article

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Files

24013.pdf 710 KB

Author(s)

Cacciato, Antonio

;

Breuil, Laurent

;

Dekkers, Harold

;

Zahid, Mohammed

;

Kar, Gouri Sankar

;

Everaert, Jean-Luc

;

;

;

Van den Bosch, Geert

;

;

Debusschere, Ingrid

;

;

Cockburn, Andrew

;

;

;

;

Journal

Electrochemical and Solid-State Letters

Statistics

1960 since deposited on 2021-10-19

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Acq. date: 2026-08-29