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A novel PEALD tunnel dielectric for three-dimensional non-volatile charge-trapping technology

Date

2011
Journal article
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dc.contributor.authorCacciato, Antonio
dc.contributor.authorBreuil, Laurent
dc.contributor.authorDekkers, Harold
dc.contributor.authorZahid, Mohammed
dc.contributor.authorKar, Gouri Sankar
dc.contributor.authorEveraert, Jean-Luc
dc.contributor.authorSchoofs, Geert
dc.contributor.authorShi, Qixian
dc.contributor.authorVan den Bosch, Geert
dc.contributor.authorJurczak, Gosia
dc.contributor.authorDebusschere, Ingrid
dc.contributor.authorVan Houdt, Jan
dc.contributor.authorCockburn, Andrew
dc.contributor.authorDate, Lucien
dc.contributor.authorXa, Li Qun
dc.contributor.authorLe, Maggie
dc.contributor.authorLee, Won
dc.contributor.imecauthorBreuil, Laurent
dc.contributor.imecauthorDekkers, Harold
dc.contributor.imecauthorKar, Gouri Sankar
dc.contributor.imecauthorEveraert, Jean-Luc
dc.contributor.imecauthorSchoofs, Geert
dc.contributor.imecauthorShi, Qixian
dc.contributor.imecauthorVan den Bosch, Geert
dc.contributor.imecauthorJurczak, Gosia
dc.contributor.imecauthorDebusschere, Ingrid
dc.contributor.imecauthorVan Houdt, Jan
dc.contributor.imecauthorCockburn, Andrew
dc.contributor.imecauthorDate, Lucien
dc.contributor.orcidimecBreuil, Laurent::0000-0003-2869-1651
dc.contributor.orcidimecDekkers, Harold::0000-0003-4778-5709
dc.contributor.orcidimecVan den Bosch, Geert::0000-0001-9971-6954
dc.contributor.orcidimecVan Houdt, Jan::0000-0003-1381-6925
dc.date.accessioned2021-10-19T12:41:32Z
dc.date.available2021-10-19T12:41:32Z
dc.date.embargo9999-12-31
dc.date.issued2011
dc.identifier.issn1099-0062
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/18635
dc.source.beginpage271
dc.source.endpage273
dc.source.issue7
dc.source.journalElectrochemical and Solid-State Letters
dc.source.volume14
dc.title

A novel PEALD tunnel dielectric for three-dimensional non-volatile charge-trapping technology

dc.typeJournal article
dspace.entity.typePublication
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