Skip to content
Institutional repository
Communities & Collections
Browse
Site
Log In
imec Publications
Presentations
Optimized thermal processing for Ti-capped CoSi2 for 0.13μm technology
Publication:
Optimized thermal processing for Ti-capped CoSi2 for 0.13μm technology
Date
2000
Presentation
Simple item page
Full metadata
Statistics
Loading...
Loading...
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Lindsay, Richard
;
Lauwers, A.
;
de Potter de ten Broeck, Muriel
;
Roelandts, Nico
;
Vrancken, Christa
;
Maex, Karen
Journal
Abstract
Description
Metrics
Views
1955
since deposited on 2021-10-14
Acq. date: 2025-10-23
Citations
Metrics
Views
1955
since deposited on 2021-10-14
Acq. date: 2025-10-23
Citations