Publication:
Optimized thermal processing for Ti-capped CoSi2 for 0.13μm technology
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1960 since deposited on 2021-10-14
1last month
Acq. date: 2026-01-25
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Statistics
Views
1960 since deposited on 2021-10-14
1last month
Acq. date: 2026-01-25
Citations