Accurate models for EUV simulation and their use for design correction

Simple item page Full metadata Statistics

Files

18876.pdf 6.24 MB

Author(s)

;

;

Baudemprez, Bart

;

Hendrickx, Eric

;

Klostermann, Ulrich K.

;

;

Zavyalova, Lena

;

Sorensen, Jacob

;

;

Metrics

1963 since deposited on 2021-10-18

Acq. date: 2025-10-23