Publication:

Crystallization behaviour of ZrO2/Al2O3-based high-k gate stacks

Date

2001
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Author(s)

Zhao, Chao
;
Richard, Olivier  
;
Bender, Hugo  
;
Houssa, Michel  
;
Carter, Richard
;
De Gendt, Stefan  
;
Heyns, Marc  
;
Young, Edward
;
Tsai, Wilman
;
Roebben, G.
;
Van der Biest, O.
;
Haukka, S.

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2233 since deposited on 2021-10-14
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Acq. date: 2026-09-11

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