Publication:

Crystallization behaviour of ZrO2/Al2O3-based high-k gate stacks

Date

2001

Presentation

Simple item page Full metadata Statistics

Author(s)

;

Richard, Olivier

;

;

;

Carter, Richard

;

De Gendt, Stefan

;

;

;

;

;

Van der Biest, O.

;

Statistics

2219 since deposited on 2021-10-14

2last month

Acq. date: 2026-02-24