Publication:

Effect of Strain on the Epitaxy of B-Doped Si0.5Ge0.5 Source/Drain Layers

Date

2021
Proceedings Paper
https://doi.org/10.1149/10404.0167ecst
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Author(s)

Rengo, Gianluca  
;
Porret, Clément  
;
Hikavyy, Andriy  
;
Rosseel, Erik  
;
Ayyad, Mustafa  
;
Morris, Richard  
;
Pourtois, Geoffrey  
;
Loo, Roger  
;
Vantomme, André

Journal

ECS Transactions

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1146 since deposited on 2021-12-06
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1785 since deposited on 2021-12-06
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Acq. date: 2026-04-26

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