Publication:

Effect of Strain on the Epitaxy of B-Doped Si0.5Ge0.5 Source/Drain Layers

Date

2021
Proceedings Paper
https://doi.org/10.1149/10404.0167ecst
Simple item page Full metadata Statistics
Loading...
Thumbnail Image

Files

Accepted version 498.16 KB

Author(s)

Rengo, Gianluca  
;
Porret, Clément  
;
Hikavyy, Andriy  
;
Rosseel, Erik  
;
Ayyad, Mustafa  
;
Morris, Richard  
;
Pourtois, Geoffrey  
;
Loo, Roger  
;
Vantomme, André

Journal

ECS Transactions

Abstract

Description

Statistics

Downloads

943 since deposited on 2021-12-06
48last month
11last week
Acq. date: 2026-02-25

Views

1783 since deposited on 2021-12-06
Acq. date: 2026-02-25

Citations

Statistics

Downloads

943 since deposited on 2021-12-06
48last month
11last week
Acq. date: 2026-02-25

Views

1783 since deposited on 2021-12-06
Acq. date: 2026-02-25

Citations