Publication:

TEM investigation of gate-all-around nanowire devices

Date

2019
Meeting abstract
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Author(s)

Favia, Paola  
;
Arimura, Hiroaki  
;
Capogreco, Elena  
;
Eneman, Geert  
;
Mertens, Hans  
;
Hikavyy, Andriy  
;
Richard, Olivier  
;
Witters, Liesbeth  
;
Kundu, Paromita
;
Loo, Roger  
;
Vancoille, Eric  
;
Bender, Hugo  

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Abstract

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1861 since deposited on 2021-10-27
Acq. date: 2026-05-18

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1861 since deposited on 2021-10-27
Acq. date: 2026-05-18

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