Publication:

TEM investigation of gate-all-around nanowire devices

Date

2019
Meeting abstract
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dc.contributor.authorFavia, Paola
dc.contributor.authorArimura, Hiroaki
dc.contributor.authorCapogreco, Elena
dc.contributor.authorEneman, Geert
dc.contributor.authorMertens, Hans
dc.contributor.authorHikavyy, Andriy
dc.contributor.authorRichard, Olivier
dc.contributor.authorWitters, Liesbeth
dc.contributor.authorKundu, Paromita
dc.contributor.authorLoo, Roger
dc.contributor.authorVancoille, Eric
dc.contributor.authorBender, Hugo
dc.contributor.imecauthorFavia, Paola
dc.contributor.imecauthorArimura, Hiroaki
dc.contributor.imecauthorCapogreco, Elena
dc.contributor.imecauthorEneman, Geert
dc.contributor.imecauthorMertens, Hans
dc.contributor.imecauthorHikavyy, Andriy
dc.contributor.imecauthorRichard, Olivier
dc.contributor.imecauthorWitters, Liesbeth
dc.contributor.imecauthorLoo, Roger
dc.contributor.imecauthorVancoille, Eric
dc.contributor.imecauthorBender, Hugo
dc.contributor.orcidimecFavia, Paola::0000-0002-1019-3497
dc.contributor.orcidimecEneman, Geert::0000-0002-5849-3384
dc.contributor.orcidimecHikavyy, Andriy::0000-0002-8201-075X
dc.contributor.orcidimecRichard, Olivier::0000-0002-3994-8021
dc.contributor.orcidimecLoo, Roger::0000-0003-3513-6058
dc.date.accessioned2021-10-27T09:09:54Z
dc.date.available2021-10-27T09:09:54Z
dc.date.issued2019
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/32953
dc.source.conferenceMicroscopy of Semiconducting Materials (MSM-XXI)
dc.source.conferencedate9/04/2019
dc.source.conferencelocationCambridge UK
dc.title

TEM investigation of gate-all-around nanowire devices

dc.typeMeeting abstract
dspace.entity.typePublication
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