Publication:

Advanced optical lithography: double patterning options for 32 and 22nm node

Date

2009
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Author(s)

Vandeweyer, Tom  
;
Maenhoudt, Mireille
;
Vangoidsenhoven, Diziana  
;
Gronheid, Roel  
;
Versluijs, Janko  
;
Miller, Andy  
;
Bekaert, Joost  
;
Truffert, Vincent  
;
Wiaux, Vincent  

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1990 since deposited on 2021-10-18
Acq. date: 2026-09-11

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1990 since deposited on 2021-10-18
Acq. date: 2026-09-11

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