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Recent advancements in EUV resist materials and process performance
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Recent advancements in EUV resist materials and process performance
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Date
2011
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Goethals, Mieke
;
Niroomand, Ardavan
;
Van Roey, Frieda
;
Hosokawa, Kohei
;
Pollentier, Ivan
Journal
Journal of Photopolymer Science and Technology
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1901
since deposited on 2021-10-19
1
last month
1
last week
Acq. date: 2025-12-12
Citations