Publication:
Selective wet removal of Hf-based layers and post-dry etch residues high-k and metal gate
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1965 since deposited on 2021-10-15
1last month
Acq. date: 2026-08-16
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Statistics
Views
1965 since deposited on 2021-10-15
1last month
Acq. date: 2026-08-16
Citations