Selective wet removal of Hf-based layers and post-dry etch residues high-k and metal gate

Simple item page Full metadata Statistics

Author(s)

;

Paraschiv, Vasile

;

;

;

;

Garaud, Sylvain

;

;

;

;

Boullart, Werner

;

De Gendt, Stefan

Metrics

1957 since deposited on 2021-10-15

Acq. date: 2025-10-23