Metal oxide semiconductor devices studies of molecula- beam-deposited Al2O3/InP heterostructures with various surface orientations (001), (110), and (111)

dc.contributor.author	Chu, Eric
dc.contributor.author	Merckling, Clement
dc.contributor.author	Dekoster, Johan
dc.contributor.author	Kwo, R.
dc.contributor.author	Hong, M.
dc.contributor.author	Caymax, Matty
dc.contributor.author	Heyns, Marc
dc.contributor.imecauthor	Merckling, Clement
dc.contributor.imecauthor	Dekoster, Johan
dc.contributor.imecauthor	Caymax, Matty
dc.contributor.imecauthor	Heyns, Marc
dc.contributor.orcidimec	Merckling, Clement::0000-0003-3084-2543
dc.date.accessioned	2021-10-20T10:18:00Z
dc.date.available	2021-10-20T10:18:00Z
dc.date.embargo	9999-12-31
dc.date.issued	2012
dc.identifier.issn	1882-0778
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/20463
dc.source.beginpage	61202
dc.source.issue	6
dc.source.journal	Applied Physics Express
dc.source.volume	5
dc.title	Metal oxide semiconductor devices studies of molecula- beam-deposited Al2O3/InP heterostructures with various surface orientations (001), (110), and (111)
dc.type	Journal article
dspace.entity.type	Publication
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