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Investigation of Dielectric and Quantum Confinement Based Dopant Deactivation in the Extension Region of FinFET
Publication:
Investigation of Dielectric and Quantum Confinement Based Dopant Deactivation in the Extension Region of FinFET
Date
2022
Journal article
https://doi.org/10.1109/LED.2022.3185025
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Saurabh, Nishant
;
Patil, Shubham
;
Rawat, Amita
;
Chiarella, Thomas
;
Parvais, Bertrand
;
Ganguly, Udayan
Journal
IEEE ELECTRON DEVICE LETTERS
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1280
since deposited on 2022-08-28
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Acq. date: 2025-10-25
Citations
Metrics
Views
1280
since deposited on 2022-08-28
389
item.page.metrics.field.last-week
Acq. date: 2025-10-25
Citations