Publication:
Plasma etch challenges of Directed Self-Assembly (DSA) for fin and contact holes patterning in 7nm (N7) technology node
Date
| dc.contributor.author | Chan, BT | |
| dc.contributor.author | Sayan, Safak | |
| dc.contributor.author | Bekaert, Joost | |
| dc.contributor.author | Doise, Jan | |
| dc.contributor.author | Gronheid, Roel | |
| dc.contributor.author | de Marneffe, Jean-Francois | |
| dc.contributor.author | Xu, Kaidong | |
| dc.contributor.imecauthor | Chan, BT | |
| dc.contributor.imecauthor | Bekaert, Joost | |
| dc.contributor.imecauthor | Doise, Jan | |
| dc.contributor.imecauthor | Gronheid, Roel | |
| dc.contributor.imecauthor | de Marneffe, Jean-Francois | |
| dc.contributor.orcidimec | Chan, BT::0000-0003-2890-0388 | |
| dc.contributor.orcidimec | Bekaert, Joost::0000-0003-3075-3479 | |
| dc.date.accessioned | 2021-10-22T00:54:12Z | |
| dc.date.available | 2021-10-22T00:54:12Z | |
| dc.date.issued | 2014 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/23623 | |
| dc.source.conference | 40th International Conference on Micro and Nano Engineering - MNE | |
| dc.source.conferencedate | 23/09/2014 | |
| dc.source.conferencelocation | Lausanne Switzerland | |
| dc.title | Plasma etch challenges of Directed Self-Assembly (DSA) for fin and contact holes patterning in 7nm (N7) technology node | |
| dc.type | Meeting abstract | |
| dspace.entity.type | Publication | |
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