Publication:
Barrier reliability on sub-100nm copper low-k interconnects
Date
| dc.contributor.author | Tokei, Zsolt | |
| dc.contributor.author | Gailledrat, T. | |
| dc.contributor.author | Li, Yunlong | |
| dc.contributor.author | Schuhmacher, Jorg | |
| dc.contributor.author | Mandrekar, T. | |
| dc.contributor.author | Guggilla, S. | |
| dc.contributor.author | Mebarki, Bencherki | |
| dc.contributor.author | Maex, Karen | |
| dc.contributor.imecauthor | Tokei, Zsolt | |
| dc.contributor.imecauthor | Li, Yunlong | |
| dc.contributor.imecauthor | Maex, Karen | |
| dc.contributor.orcidimec | Li, Yunlong::0000-0003-4791-4013 | |
| dc.date.accessioned | 2021-10-15T16:40:51Z | |
| dc.date.available | 2021-10-15T16:40:51Z | |
| dc.date.issued | 2004 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/9684 | |
| dc.source.conference | Advanced Metallization Conference | |
| dc.source.conferencedate | 19/10/2004 | |
| dc.source.conferencelocation | San Diego, CA USA | |
| dc.title | Barrier reliability on sub-100nm copper low-k interconnects | |
| dc.type | Oral presentation | |
| dspace.entity.type | Publication | |
| Files | ||
| Publication available in collections: |