Publication:

Status of EUV lithography at IMEC

Date

2007

Journal article

Simple item page Full metadata Statistics

Files

15220.pdf 523.92 KB

Author(s)

Goethals, Mieke

;

Jonckheere, Rik

;

;

;

Van Roey, Frieda

;

;

;

Niroomand, Ardavan

;

;

Stepanenko, Nickolay

;

Journal

Journal of Photopolymer Science & Technology

Metrics

1930 since deposited on 2021-10-16

Acq. date: 2025-12-09