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Stress relaxation in Al(Cu) thin films
Publication:
Stress relaxation in Al(Cu) thin films
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Date
1997
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Proost, Joris
;
Witvrouw, Ann
;
Cosemans, P.
;
Roussel, Philippe
;
Maex, Karen
Journal
Microelectronic Engineering
Abstract
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1895
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Acq. date: 2025-12-12
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Metrics
Views
1895
since deposited on 2021-09-30
2
last month
Acq. date: 2025-12-12
Citations