Publication:

Co-optimizatin of RegC and TWINSCANTM corrections to improve the intra-field on-product overlay performance

Date

2016

Proceedings Paper

Simple item page Full metadata Statistics

Files

33793.pdf 5.46 MB

Author(s)

;

;

Dmitriev, Vladimir

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;

van Haren, Richard

;

Roelofs, Christian

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;

Gallagher, Emily

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Leray, Philippe

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;

Trautsch, Thomas

;

Steinert, Steffen

Statistics

1948 since deposited on 2021-10-23

Acq. date: 2026-01-27