Publication:

Composition analysis of III-V materials grown in nanostructures for semiconductor applications: the self focusing SIMS approach

Date

2015
Meeting abstract
Simple item page Full metadata Statistics
 
dc.contributor.authorFranquet, Alexis
dc.contributor.authorDouhard, Bastien
dc.contributor.authorMerckling, Clement
dc.contributor.authorConard, Thierry
dc.contributor.authorVandervorst, Wilfried
dc.contributor.imecauthorFranquet, Alexis
dc.contributor.imecauthorDouhard, Bastien
dc.contributor.imecauthorMerckling, Clement
dc.contributor.imecauthorConard, Thierry
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecFranquet, Alexis::0000-0002-7371-8852
dc.contributor.orcidimecMerckling, Clement::0000-0003-3084-2543
dc.contributor.orcidimecConard, Thierry::0000-0002-4298-5851
dc.date.accessioned2021-10-22T19:16:38Z
dc.date.available2021-10-22T19:16:38Z
dc.date.embargo9999-12-31
dc.date.issued2015
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/25278
dc.source.beginpageSR1-ThM-1
dc.source.conference20th International Conference on Secondary Ion Mass Spectrometry - SIMS XX
dc.source.conferencedate13/09/2015
dc.source.conferencelocationSeattle, WA USA
dc.title

Composition analysis of III-V materials grown in nanostructures for semiconductor applications: the self focusing SIMS approach

dc.typeMeeting abstract
dspace.entity.typePublication
Files

Original bundle

Name:
32243.pdf
Size:
67.73 KB
Format:
Adobe Portable Document Format
Download
Publication available in collections:
Conference contributions