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Optimization of the piezoresistive and electrical properties of polycrystalline silicon-germanium for MEMS sensor applications
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1947 since deposited on 2021-10-18
1last month
Acq. date: 2026-01-10
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1947 since deposited on 2021-10-18
1last month
Acq. date: 2026-01-10
Citations