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Optimization of the piezoresistive and electrical properties of polycrystalline silicon-germanium for MEMS sensor applications
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1950 since deposited on 2021-10-18
2last month
Acq. date: 2026-04-27
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Statistics
Views
1950 since deposited on 2021-10-18
2last month
Acq. date: 2026-04-27
Citations