Publication:
Optimization of the piezoresistive and electrical properties of polycrystalline silicon-germanium for MEMS sensor applications
Date
| dc.contributor.author | Gonzalez, Pilar | |
| dc.contributor.author | Haspeslagh, Luc | |
| dc.contributor.author | De Meyer, Kristin | |
| dc.contributor.author | Witvrouw, Ann | |
| dc.contributor.imecauthor | Gonzalez, Pilar | |
| dc.contributor.imecauthor | Haspeslagh, Luc | |
| dc.contributor.imecauthor | De Meyer, Kristin | |
| dc.date.accessioned | 2021-10-18T16:37:47Z | |
| dc.date.available | 2021-10-18T16:37:47Z | |
| dc.date.issued | 2010 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/17166 | |
| dc.source.beginpage | 580 | |
| dc.source.conference | 23rd IEEE International Conference on Micro Electro Mechanical Systems - MEMS | |
| dc.source.conferencedate | 24/01/2010 | |
| dc.source.conferencelocation | Hong Kong China | |
| dc.source.endpage | 583 | |
| dc.title | Optimization of the piezoresistive and electrical properties of polycrystalline silicon-germanium for MEMS sensor applications | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
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