Publication:
Cu(Mn) seed layers in single damascene trenches with dimensions down to 30 nm
Date
Loading...
Files
Journal
Abstract
Description
Metrics
Views
1969 since deposited on 2021-10-18
1last month
Acq. date: 2025-12-08
Citations
Metrics
Views
1969 since deposited on 2021-10-18
1last month
Acq. date: 2025-12-08
Citations