Defectivity reduction in EUV resists through novel high-performance Point-Of-Use (POU) filters

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Author(s)

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Sakakibara, Hirokazu

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Ibrahim, Sheik Ansar Usman

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Sakamoto, Atsushi

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Singh, Amarnauth

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Skjonnemand, Karl

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Foubert, Philippe

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Journal

N/A

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814 since deposited on 2023-07-28

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Acq. date: 2025-10-24