Publication:

Scaling of high-k dielectrics towards sub-1nm EOT

Date

2003
Proceedings Paper
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dc.contributor.authorHeyns, Marc
dc.contributor.authorBeckx, Stephan
dc.contributor.authorBender, Hugo
dc.contributor.authorBlomme, Pieter
dc.contributor.authorBoullart, Werner
dc.contributor.authorBrijs, Bert
dc.contributor.authorCarter, Richard
dc.contributor.authorCaymax, Matty
dc.contributor.authorClaes, Martine
dc.contributor.authorConard, Thierry
dc.contributor.authorDe Gendt, Stefan
dc.contributor.authorDegraeve, Robin
dc.contributor.authorDelabie, Annelies
dc.contributor.authorDeweerd, Wim
dc.contributor.authorGroeseneken, Guido
dc.contributor.authorHenson, Kirklen
dc.contributor.authorKauerauf, Thomas
dc.contributor.authorKubicek, Stefan
dc.contributor.authorLucci, Luca
dc.contributor.authorLujan, Guilherme
dc.contributor.imecauthorHeyns, Marc
dc.contributor.imecauthorBeckx, Stephan
dc.contributor.imecauthorBender, Hugo
dc.contributor.imecauthorBlomme, Pieter
dc.contributor.imecauthorBoullart, Werner
dc.contributor.imecauthorCaymax, Matty
dc.contributor.imecauthorClaes, Martine
dc.contributor.imecauthorConard, Thierry
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.imecauthorDegraeve, Robin
dc.contributor.imecauthorDelabie, Annelies
dc.contributor.imecauthorGroeseneken, Guido
dc.contributor.imecauthorKubicek, Stefan
dc.contributor.imecauthorRichard, Olivier
dc.contributor.imecauthorSchram, Tom
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.imecauthorVan Elshocht, Sven
dc.contributor.imecauthorWitters, Thomas
dc.contributor.imecauthorMaes, Jan
dc.contributor.imecauthorDate, Lucien
dc.contributor.orcidimecBoullart, Werner::0000-0001-7614-2097
dc.contributor.orcidimecConard, Thierry::0000-0002-4298-5851
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.contributor.orcidimecRichard, Olivier::0000-0002-3994-8021
dc.contributor.orcidimecVan Elshocht, Sven::0000-0002-6512-1909
dc.date.accessioned2021-10-15T04:54:20Z
dc.date.available2021-10-15T04:54:20Z
dc.date.issued2003
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/7649
dc.source.beginpage251
dc.source.conferenceIEEE International Symposium on VLSI Technology, Systems, and Applications
dc.source.conferencedate23/04/2003
dc.source.conferencelocationHsinchu Taiwan
dc.source.endpage254
dc.title

Scaling of high-k dielectrics towards sub-1nm EOT

dc.typeProceedings paper
dspace.entity.typePublication
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