Publication:
Energy and angular dependence of the sputter yield and ionization yield of Ge bombarded by O2+
Date
| dc.contributor.author | Huyghebaert, Cedric | |
| dc.contributor.author | Conard, Thierry | |
| dc.contributor.author | Vandervorst, Wilfried | |
| dc.contributor.imecauthor | Huyghebaert, Cedric | |
| dc.contributor.imecauthor | Conard, Thierry | |
| dc.contributor.imecauthor | Vandervorst, Wilfried | |
| dc.contributor.orcidimec | Huyghebaert, Cedric::0000-0001-6043-7130 | |
| dc.contributor.orcidimec | Conard, Thierry::0000-0002-4298-5851 | |
| dc.date.accessioned | 2021-10-15T13:59:53Z | |
| dc.date.available | 2021-10-15T13:59:53Z | |
| dc.date.issued | 2004 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/9079 | |
| dc.source.beginpage | 693 | |
| dc.source.conference | Proceedings of the 14th Int. Conference on Secondary Ion Mass Spectrometry and related Topics - SIMS XIV | |
| dc.source.conferencedate | 14/09/2003 | |
| dc.source.conferencelocation | San Diego, CA USA | |
| dc.source.endpage | 697 | |
| dc.title | Energy and angular dependence of the sputter yield and ionization yield of Ge bombarded by O2+ | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
| Files | ||
| Publication available in collections: |