Publication:
Double patterning OPC and design for 22nm to 16nm device nodes
Date
Loading...
Files
Journal
Abstract
Description
Statistics
Views
1918 since deposited on 2021-10-18
Acq. date: 2026-03-17
Citations
Statistics
Views
1918 since deposited on 2021-10-18
Acq. date: 2026-03-17
Citations