Publication:
Influence of porosity on VUV induced damage to low-k dielectrics
Date
| dc.contributor.author | Choudhury, F. | |
| dc.contributor.author | de Marneffe, Jean-Francois | |
| dc.contributor.author | Baklanov, Mikhaïl | |
| dc.contributor.author | King, S. | |
| dc.contributor.author | Nishi, Y. | |
| dc.contributor.author | Shohet, J. | |
| dc.contributor.imecauthor | de Marneffe, Jean-Francois | |
| dc.date.accessioned | 2021-10-22T18:42:04Z | |
| dc.date.available | 2021-10-22T18:42:04Z | |
| dc.date.issued | 2015 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/25080 | |
| dc.source.conference | AVD 62nd International Symposium & Exhibition | |
| dc.source.conferencedate | 18/10/2015 | |
| dc.source.conferencelocation | San Jose, CA USA | |
| dc.title | Influence of porosity on VUV induced damage to low-k dielectrics | |
| dc.type | Meeting abstract | |
| dspace.entity.type | Publication | |
| Files | ||
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