Publication:

Experimental evidence of non-uniform dielectric charging in capacitive RF-MEMS switches

Date

2007-09
Proceedings Paper
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Author(s)

Czarnecki, Piotr  
;
Rottenberg, Xavier  
;
Soussan, Philippe  
;
Nolmans, Philip  
;
Ekkels, Phillip
;
Muller, Philippe  
;
Tilmans, Harrie  
;
De Raedt, Walter  
;
Puers, Bob  
;
Marchand, Laurent
;
De Wolf, Ingrid  

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1973 since deposited on 2021-10-16
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