Publication:

Experimental evidence of non-uniform dielectric charging in capacitive RF-MEMS switches

Date

2007-09
Proceedings Paper
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dc.contributor.authorCzarnecki, Piotr
dc.contributor.authorRottenberg, Xavier
dc.contributor.authorSoussan, Philippe
dc.contributor.authorNolmans, Philip
dc.contributor.authorEkkels, Phillip
dc.contributor.authorMuller, Philippe
dc.contributor.authorTilmans, Harrie
dc.contributor.authorDe Raedt, Walter
dc.contributor.authorPuers, Bob
dc.contributor.authorMarchand, Laurent
dc.contributor.authorDe Wolf, Ingrid
dc.contributor.imecauthorCzarnecki, Piotr
dc.contributor.imecauthorRottenberg, Xavier
dc.contributor.imecauthorSoussan, Philippe
dc.contributor.imecauthorNolmans, Philip
dc.contributor.imecauthorMuller, Philippe
dc.contributor.imecauthorTilmans, Harrie
dc.contributor.imecauthorDe Raedt, Walter
dc.contributor.imecauthorPuers, Bob
dc.contributor.imecauthorDe Wolf, Ingrid
dc.contributor.orcidimecSoussan, Philippe::0000-0002-1347-6978
dc.contributor.orcidimecTilmans, Harrie::0000-0003-4240-4962
dc.contributor.orcidimecDe Raedt, Walter::0000-0002-7117-7976
dc.contributor.orcidimecDe Wolf, Ingrid::0000-0003-3822-5953
dc.date.accessioned2021-10-16T15:27:39Z
dc.date.available2021-10-16T15:27:39Z
dc.date.issued2007-09
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/11933
dc.source.beginpage227
dc.source.conference18th Workshop on MicroMechanics Europe
dc.source.conferencedate16/09/2007
dc.source.conferencelocationGuimaraes Portugal
dc.source.endpage230
dc.title

Experimental evidence of non-uniform dielectric charging in capacitive RF-MEMS switches

dc.typeProceedings paper
dspace.entity.typePublication
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