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Publication:

Alpha-Ta formation and its impact on electromigration

Date

2004

Proceedings Paper

Simple item page Full metadata Statistics

Files

8868.pdf 516.25 KB

Author(s)

Demuynck, Steven

;

;

Bruynseraede, Christophe

;

Michelon, Julien

;

Statistics

1910 since deposited on 2021-10-15

Acq. date: 2026-07-27