Publication:
Advanced nanoporous functional layer materials with extremely low dielectric constant
Date
| dc.contributor.author | Miller, Miroslaw | |
| dc.contributor.author | Urbanowicz, Adam | |
| dc.contributor.author | Broczkowska, Katarzyna | |
| dc.date.accessioned | 2021-10-18T19:08:55Z | |
| dc.date.available | 2021-10-18T19:08:55Z | |
| dc.date.issued | 2010 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/17632 | |
| dc.source.conference | 11th International Workshop on Stress-Induced Phenomena in Metallization | |
| dc.source.conferencedate | 12/04/2010 | |
| dc.source.conferencelocation | Dresden Germany | |
| dc.title | Advanced nanoporous functional layer materials with extremely low dielectric constant | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
| Files | ||
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